APEVA which is a core partner of CORNET is the technology leader in gas transport deposition systems and production lines, with more than 3.000 deposition systems delivered all over the world (mainly MOCVD systems for AIXTRON in which APEVA is an affiliated company, has over 60% of the total market).
The project innovations in robust in-line metrology tools for highly integrated micro/nano sized components and products, and control platform will enable the revolution of other APEVA’s gas transport processes (e.g. OVPD, PVPD) as well as AIXTRON's vacuum systems (ALD, VTE, MOCVD, CVD, etc.).